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Trends in Research and Development of Lithography Technology for Next-generation LSIs
http://hdl.handle.net/11035/2543
http://hdl.handle.net/11035/2543e2a9998d-db46-4bc4-8180-384e9e1fab85
名前 / ファイル | ライセンス | アクション |
---|---|---|
本文 (88.1 kB)
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Item type | 一般雑誌記事(NISTEP発行) / Article_201902(1) | |||||
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公開日 | 2018-12-28 | |||||
タイトル | ||||||
タイトル | Trends in Research and Development of Lithography Technology for Next-generation LSIs | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 科学技術予測・科学技術動向 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 科学技術動向 | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | article | |||||
発行日 | ||||||
値 | 2002-09 | |||||
著者 |
小笠原, 敦
× 小笠原, 敦 |
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所属 | ||||||
値 | Science & Technology Foresight Center | |||||
書誌情報 |
Science & Technology Trends Quarterly Review2002 September en : Science & Technology Trends 発行日 2002 |
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発行元 | ||||||
出版者 | Science & Technology Foresight Center(NISTEP) | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1349-3663 |