@article{oai:nistep.repo.nii.ac.jp:00006192,
 author = {小笠原, 敦},
 journal = {Science & Technology Trends Quarterly Review2002 September, Science & Technology Trends},
 month = {},
 title = {Trends in Research and Development of Lithography Technology for Next-generation LSIs},
 year = {2002},
 yomi = {オガサワラ, アツシ}
}