@article{oai:nistep.repo.nii.ac.jp:00006493, author = {吉永, 孝司 and 野村, 稔}, journal = {Science & Technology Trends Quarterly Review2010 October, Science & Technology Trends}, month = {}, title = {Trends in R&D in TSV Technology for 3D LSI Packaging}, year = {2010}, yomi = {ヨシナガ, タカシ and ノムラ, ミノル} }