@article{oai:nistep.repo.nii.ac.jp:00006337, author = {小松, 裕司 and 小笠原, 敦}, journal = {Science & Technology Trends Quarterly Review2005 July, Science & Technology Trends}, month = {}, title = {Applying Nanotechnology to Electronics - Recent Progress in Si-LSIs to Extend Nano-Scale -}, year = {2005}, yomi = {コマツ, ヒロシ and オガサワラ, アツシ} }