@article{oai:nistep.repo.nii.ac.jp:00006311,
 author = {立野, 公男},
 journal = {Science & Technology Trends Quarterly Review2004 October, Science & Technology Trends},
 month = {},
 title = {Recent Trends in Semiconductor Microfabrication Equipment Technology - Proposals for Industry-Academy Collaboration on Research and Development in Japan -},
 year = {2004},
 yomi = {タツノ, キミオ}
}