@article{oai:nistep.repo.nii.ac.jp:00006299,
 author = {小松, 裕司},
 journal = {Science & Technology Trends Quarterly Review2004 July, Science & Technology Trends},
 month = {},
 title = {Trends of Research and Development in Semiconductor Manufacturing Technologies - From Presentations at Recent International Conferences and Other Sources -},
 year = {2004},
 yomi = {コマツ, ヒロシ}
}