@article{oai:nistep.repo.nii.ac.jp:00006242, author = {山崎, 哲也}, journal = {Science & Technology Trends Quarterly Review2003 February, Science & Technology Trends}, month = {}, title = {Research Trend in LSI Technologies - Report on Presentations at the VLSI Symposia and the Silicon Nano-electronics Workshop -}, year = {2003}, yomi = {ヤマザキ, テツヤ} }