@article{oai:nistep.repo.nii.ac.jp:00006239,
 author = {奥和田, 久美},
 journal = {Science & Technology Trends Quarterly Review2003 February, Science & Technology Trends},
 month = {},
 title = {New Development in MEMS Research},
 year = {2003},
 yomi = {オクワダ, クミ}
}