{"created":"2023-05-15T13:36:07.129857+00:00","id":5260,"links":{},"metadata":{"_buckets":{"deposit":"ffdc237b-3c6d-4b4c-8b07-531b958b1523"},"_deposit":{"created_by":2,"id":"5260","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"5260"},"status":"published"},"_oai":{"id":"oai:nistep.repo.nii.ac.jp:00005260","sets":["31:41:42:80"]},"author_link":["8266"],"item_7_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004","bibliographicIssueDateType":"Issued"},"bibliographic_titles":[{"bibliographic_title":"科学技術動向2004年5月号"},{"bibliographic_title":"Science & Technology Trends","bibliographic_titleLang":"en"}]}]},"item_7_publisher_8":{"attribute_name":"発行元","attribute_value_mlt":[{"subitem_publisher":"科学技術政策研究所 科学技術動向研究センター"}]},"item_7_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"1349-3663","subitem_source_identifier_type":"ISSN"}]},"item_7_text_1":{"attribute_name":"発行日","attribute_value_mlt":[{"subitem_text_value":"2004-05"}]},"item_7_text_5":{"attribute_name":"所属","attribute_value_mlt":[{"subitem_text_value":"科学技術動向研究センター"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"立野, 公男"},{"creatorName":"タツノ, キミオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"8266","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-12-28"}],"displaytype":"detail","filename":"NISTEP-STT038-21.pdf","filesize":[{"value":"617.0 kB"}],"format":"application/pdf","licensetype":"license_6","mimetype":"application/pdf","url":{"label":"本文","url":"https://nistep.repo.nii.ac.jp/record/5260/files/NISTEP-STT038-21.pdf"},"version_id":"45f60aef-66e9-4951-b8fb-b26f4b151954"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"科学技術予測・科学技術動向","subitem_subject_scheme":"Other"},{"subitem_subject":"科学技術動向","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"半導体微細加工装置技術の最新動向 ―開発研究における日本の産学連携への提言―","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"半導体微細加工装置技術の最新動向 ―開発研究における日本の産学連携への提言―"}]},"item_type_id":"7","owner":"2","path":["80"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-12-28"},"publish_date":"2018-12-28","publish_status":"0","recid":"5260","relation_version_is_last":true,"title":["半導体微細加工装置技術の最新動向 ―開発研究における日本の産学連携への提言―"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-05-15T14:58:30.014000+00:00"}